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Junige, Marcel
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ResearcherID: A-5786-2011
URL: http://www.researcherid.com/rid/A-5786-2011
Subject: Chemistry; Engineering; Materials Science; Microscopy; Physics; Spectroscopy
Keywords: atomic layer deposition (ald); ruthenium (ru); spectroscopic ellipsometry (se); in-situ; real time; quadrupole mass spectrometry (qms); x-ray photoelectron spectroscopy (xps, esca); scanning probe microscopy; rutheniumdioxide (ruo2); strontium ruthenate (srruo3)
ORCID: http://orcid.org/0000-0002-6633-2759
My Institutions (more details)
Primary Institution:
Sub-org/Dept: Institute of Semiconductor and Microsystems Technology (IHM)
Role:
Past Institutions: University of Colorado Boulder; University of Nebraska-Lincoln, UNL; Nano-electronic Materials Laboratory gGmbH, NaMLab
My URLs: www.junige.de
 
 

This list contains papers that I have authored.

publication(s)  
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1.  Title: Area-selective atomic layer deposition of Ru on electron-beam-written Pt(C) patterns versus SiO2 substratum
 Author(s): Marcel Junige; Markus Löffler; Marion Geidel; et al.
 Source: Nanotechnology Published: 2017
 DOI: 10.1088/1361-6528/aa8844
added
25-Aug-17
2.  Title: Atomic layer deposition of Al2O3 on NF3-pre-treated graphene
 Author(s): Junige, M.; Oddoy, T.; Yakimova, R.; et al.
 Conference: Proceedings of SPIE - The International Society for Optical Engineering Volume: 9519 Year: 2015
 Times Cited: 1
 DOI: 10.1117/12.2181242 /  Author-provided URL : http://www.scopus.com/inward/record.url?eid=2-s2.0-84938844724&partnerID=MN8TOAR ...
added
27-Jan-17
3.  Title: Graphene based electron field emitter
 Author(s): Wenger, Christian; Kitzmann, Julia; Wolff, Andre; et al.
 Source: Journal of Vacuum Science & Technology B Volume: 33 Issue: 1 Published: JAN 2015
 Times Cited: 5
 DOI: 10.1116/1.4905937
added
04-Sep-15
4.  Title: In-situ real-time monitoring and control of kinetic processes in Atomic Layer Depositions by Spectroscopic Ellipsometry with 1.25 Hz sampling rate
 Author(s): Junige, Marcel; Sharma, Varun; Tanner, Ralf; et al.
 Conference: 2015 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN.April 14-16, 2015 Dresden, Germany Year: 2015
 DOI: 10.13140/RG.2.1.4138.4485
added
27-Jan-17
5.  Title: Atomic layer deposition for high aspect ratio through silicon vias
 Author(s): Knaut, Martin; Junige, Marcel; Neumann, Volker; et al.
 Source: Microelectronic Engineering Volume: 107 Pages: 80-83 Published: JUL 2013
 Times Cited: 8
 DOI: 10.1016/j.mee.2013.01.031
added
08-Nov-13
6.  Title: Evaluation of a metal-organic precursor with regard to a gold ALD process by utilizing in-situ spectroscopic ellipsometry
 Author(s): Junige, Marcel; Schmidt, Daniel; Barry, Seán T.; et al.
 Source: AVS 13th International Conference on Atomic Layer Deposition.July 28 – 31, 2013, San Diego, California, USA Published: 2013
added
08-Nov-13
7.  Title: Fabrication and optical modeling of nanohybrid functional slanted columnar thin films
 Author(s): Schmidt, Daniel; Junige, Marcel; Bartha, Johann W.; et al.
 Conference: 6th International Conference on Spectroscopic Ellipsometry (ICSE-VI). May 26-31, 2013 in Kyoto, Japan Year: 2013
added
14-Feb-13
8.  Title: In-situ analysis on the initial growth of ultra-thin ruthenium films with atomic layer deposition
 Author(s): Geidel, Marion; Junige, Marcel; Albert, Matthias; et al.
 Source: Microelectronic Engineering Volume: 107 Pages: 151-155 Published: JUL 2013
 Times Cited: 9
 DOI: 10.1016/j.mee.2012.08.026
added
08-Nov-13
9.  Title: Atomic layer deposition for high aspect ratio through silicon vias
 Author(s): Knaut, Martin; Junige, Marcel; Wojcik, Henry; et al.
 Conference: Materials for Advanced Metallization.Grenoble, France, March 11 - 14, 2012 Year: 2012
added
13-Jul-12
10.  Title: Atomic layer deposition monitored and characterized by joint in situ real-time spectroscopic ellipsometry and direct surface analysis
 Author(s): Junige, Marcel; Geidel, Marion; Knaut, Martin; et al.
 Conference: AVS 59th Annual International Symposium and Exhibition.October 28 – November 02, 2012, Tampa, Florida, USA Year: 2012
 Author-provided URL : http://www2.avs.org/symposium
added
13-Jul-12
publication(s)  
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